Planar Current Density Probe - Triax

Regular price $2,050.00

General Purpose Current Density Probe

This is a planar style Faraday probe with guard ring, well suited to current density measurements in both commercial plasma processing and electric propulsion environments.

Typically, the collector and guard ring are biased negative of chamber ground or plasma potential, by about 20 V, to repel electrons and only collect ions. The probe body is isolated from the collector and guard electrodes for easy placement on any chamber surface; the body is typically connected electrically to the chamber by the triax cable and feedthrough.

This probe features graphite front-facing surfaces for minimum sputter contamination. Stainless steel components are available and can be substituted if the probe is to be heavily used in oxygen-rich environments.

The probe mounts via #4 screws on the rear side of the probe. A triaxial cable carries the guard and collector biases/currents.

Collector area: 0.5 cm2

Lead Time: Typically 4 weeks if not in stock.

The "Probe Only" option is the current density probe having a triaxial connector.

The "Probe + Feedthrough + Cables" option includes the probe, in-vacuum and air-side teflon-based triax cables, and a double-ended triax feedthrough. By default, each cable is 10 feet (3 meters) long, and the triax feedthrough is mounted on a KF40 flange - we will confirm these options prior to assembly.

Accessories: Plasma Controls can provide both in-vacuum and air-side triaxial cables at customer-specified lengths, as well as coaxial feedthroughs mounted on KF16, KF40, KF50, Conflat CF1.33, CF2.75, CF3.375, NASA 4.5"OD standard, or customer-specified flanges.