General Purpose Current Density Probe
This is a planar style Faraday probe with guard ring, well suited to current density measurements in both commercial plasma processing and electric propulsion environments.
Typically, the collector and guard ring are biased negative of chamber ground or plasma potential, by about 20 V, to repel electrons and only collect ions. The probe body is isolated from the collector and guard electrodes for easy placement on any chamber surface.
This probe features graphite front-facing surfaces for minimum sputter contamination. Stainless steel components are available and can be substituted if the probe is to be heavily used in oxygen-rich environments.
The probe mounts via #4 screws on the rear side of the probe.
A three-conductor cable carries the collector, guard, and body connections.
Collector area: 0.5 cm2
Lead Time: Typically 4 weeks if not in stock.
The "Probe Only" option is the current density probe having a side-mounted 3-conductor connector.
The "Probe + Feedthrough + Cables" option includes the probe, in-vacuum and air-side teflon-based cables, and a double-ended feedthrough. By default, each cable is 10 feet (3 meters) long, and the feedthrough is mounted on a KF40 flange - we will confirm these options prior to assembly.
Accessories: Plasma Controls can provide both in-vacuum and air-side cables at customer-specified lengths, as well as feedthroughs mounted on KF16, KF40, KF50, Conflat CF1.33, CF2.75, CF3.375, NASA 4.5"OD standard, or customer-specified flanges.